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[M] Handbook of ion implantation technology
edited by J.F. Ziegler
Creator: Ziegler, J. F. Publisher: North-Holland
(Date of publication: 1992)
Titlte alternative: | Ion implantation technology |
Form: | Volume |
Language: | English |
Physical description: | vii, 700 p. ; 25 cm |
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ISBN: 9780444897350
NCID: BA18974475
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