[M] Chemical physics of thin film deposition processes for micro- and nano-technologies

edited by Yves Pauleau
Creator: Pauleau, Y. Publisher: Kluwer Academic (Date of publication: 2002)

• Detail

Titlte alternative:	Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001
Series statement:	NATO science series, Sub-series II, Mathematics, physics and chemistry v. 55
Form:	Volume
Language:	English
Physical description:	xiii, 363 p. ; 25 cm
Subject:
Classification:	UDC: 539.216
Tag:
Identifier:	ISBN: 9781402005251 NCID: BA57112551
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
602722	Namiki	Books 11	539.216|P|	Available On Shelf

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