[M] Handbook of sputter deposition technology : principles, technology, and applications

by Kiyotaka Wasa and Shigeru Hayakawa
Creator: Wasa, Kiyotaka Hayakawa, Shigeru Publisher: Noyes Publications (Date of publication: 1992)

• Detail

Series statement:	Materials science and process technology series
Form:	Volume
Language:	English
Physical description:	xii, 304 p. ; 25 cm
Subject:
Classification:	UDC: 539.23
Tag:
Identifier:	ISBN: 9780815512806 NCID: BA2181598X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
602736	Namiki	Books 11	539.23|W|	Available On Shelf

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