[M] Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials

S. Sivaram
Creator: Sivaram, Srinivasan Publisher: Springer (Date of publication: 1995)
https://doi.org/10.1007/978-1-4757-4751-5

• Detail

Form:	Online resource
Language:	English
Physical description:	xii, 292 p.
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Identifier:	ISBN: 9781475747515 DOI: 10.1007/978-1-4757-4751-5
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Item identifier	Library	Shelf	Call number	Circulation status
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