資料の表示
[M]
Fundamentals of Microfabrication and Nanotechnology Three-Volume Set 
Marc J. Madou
著者:
Madou, Marc J. 出版者:
CRC Press
(出版日:
2011)
https://doi.org/10.1201/9781315274164 
| 版: | Third Edition |
|---|---|
| 巻号: | 巻: Three-Volume Set |
| 形態: |
オンラインリソース
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| 言語: | English |
| ページ数と大きさ: | Vol 1: xv, 630 p., Vol 2: xiii, 642 p., Vol 3: xiii, 626 p. |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: |
ISBN: 9781315274164
NCID: BB06582045
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| アブストラクト: | |
| 注記: |
Three-Volume Set, Vol 1: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology, Vol 2: Manufacturing techniques for microfabrication and nanotechnology, Vol 3: From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications |