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Microelectromechanical Structures for Materials Research : Symposium held April 15-16, 1998, San Francisco, California, U.S.A. : MRS Vol.518 Vol.518 Vol.518 
Creator: editors: Stuart Brown , John Gilbert , Henry Guckel [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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| Number: | Volume number: Vol.518 |
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Volume
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| Language: | English |
| Physical description: | 248p; 24cm ; 24.0 cm. |
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| Identifier: | ISBN: 9781558994249 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218007 | Sengen |
Proceedings 26 
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MRS|P|10798 | Available On Shelf |