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[M] Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A. Volume

editors, Stuart Brown ... [et al.]
Creator: Publisher: Materials Research Society (Date of publication: 1998)

Series statement:
  • Materials Research Society symposium proceedings v. 518
Form: Volume Volume
Language: English
Physical description: xi, 248 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781558994249
Abstract:

Note:

Includes bibliographical references and index

Item identifier Library Shelf Call number Circulation status
218007 Namiki Journal Archives 60 Picture MRS|P|518 Available On Shelf