[M] 半導体および絶縁体へのイオン注入技術

大吉啓司著
Creator: 大吉, 啓司 Publisher: アイピーシー (Date of publication: 2003-03)

• Detail

Form:	Volume
Language:	Japanese
Physical description:	iii, 151p ; 27cm
Subject:
Classification:	UDC: 543.5
Tag:
Identifier:	ISBN: 9784901493321 NCID: BA68365763
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
534150	Namiki	Books 14	543.5|O|H20.35	Available On Shelf

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