[M] Microelectronics processing : inorganic materials characterization

Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society
Creator: Casper, Lawrence A. American Chemical Society. Division of Industrial and Engineering Chemistry Publisher: American Chemical Society (Date of publication: 1986)

• Detail

Series statement:	ACS symposium series 295
Form:	Volume
Language:	English
Physical description:	x, 443 p. ; 24 cm
Subject:
Classification:	UDC: 537.5
Tag:
Identifier:	ISBN: 9780841209343 NCID: BA00560858
Abstract:
Note:	Includes bibliographies and indexes

Item identifier	Library	Shelf	Call number	Circulation status
525186	Namiki	Books 9	537.5||04632	Available On Shelf

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