資料の表示
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Microelectronics processing : inorganic materials characterization 
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society
著者: Casper, Lawrence A. American Chemical Society. Division of Industrial and Engineering Chemistry 出版者: American Chemical Society (出版日: 1986)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | x, 443 p. ; 24 cm |
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ISBN: 9780841209343
NCID: BA00560858
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| 注記: |
Includes bibliographies and indexes |
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