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Handbook of thin film process technology 
editors, David A. Glocker, S. Ismat Shah
Creator: Glocker, David A. Shah, S. Ismat Publisher: Institute of Physics Pub. (Date of publication: 1995)
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Volume
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| Language: | English |
| Physical description: | 1 v. (various pagings) ; 31 cm |
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ISBN: 9780750303118
NCID: BA25838659
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Includes bibliographical references and index |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 523100 | Namiki |
Reference Books 3 
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(03)539.||05234 |
Available On Shelf Not For Loan |