資料の表示
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Gettering and deffect engineering in the semiconductor technology : GADEST '89 : proceedings of the 3rd International Autumn Meeting held in Garzau, German Democratic Republic, October 8-13, 1989 
edited by M. Kittler
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Kittler, M. 出版者: Sci-Tech Publications (出版日: 1989)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 607 p. ; 25 cm |
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ISBN: 9783908044048
NCID: BA18733242
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