資料の表示
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Gettering and deffect engineering in semiconductor technology : GADEST '95 : proceedings of the 6th International Autumn Meeting, held in Parkhotel Schloß Wulkow, near Berlin, Germany, September 02-07, 1995 
editors, H. Richter, M. Kittler and C. Claeys
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Richter, Hans Kittler, Martin Claeys, Cor 出版者: SciTec Publications (出版日: 1995)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xv, 621 p. ; 25 cm |
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ISBN: 9783908450115
NCID: BA26129913
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| 注記: |
Includes bibliographical references and index |
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