[M] The Physics of Microfabrication

Creator: Ivor Brodie and Julius J. Muray Publisher: Plenum Press (Date of publication: 1982)

• Detail

Form:	Volume
Language:	English
Physical description:	503p; 24cm
Subject:
Classification:	UDC: 539.2
Tag:
Identifier:	ISBN: 9780306408632
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
201904	Sengen	Books 5	539.2|Ｂ|7177	Available On Shelf

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