Showing Manifestation
[M]
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. 
editors, Hans-Joachim L. Gossmann ... [et al.]
Creator: Gossmann, Hans-Joachim L. Publisher: Materials Research Society (Date of publication: 1999)
| Series statement: |
|
| Form: |
Volume
|
| Language: | English |
| Physical description: | xi, 298 p. ; 24 cm |
| Subject: | |
| Classification: | |
| Tag: |
|
| Identifier: |
ISBN: 9781558994751
NCID: BA43280751
|
| Abstract: | |
| Note: |
Includes bibliographical references and index |
|---|
| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218344 | Namiki |
Journal Archives 60 
|
MRS|P|568 | Available On Shelf |