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Ion implantation technology-94 : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994 
editors, Salvatore Coffa ... [et al.]
Creator: International Conference on Ion Implantation Technology Coffa, Salvatore Publisher: North-Holland (Date of publication: 1995)
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Volume
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| Language: | English |
| Physical description: | xvii, 1012 p. ; 27cm |
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ISBN: 9780444821942
NCID: BA25973814
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| Note: |
Include author index//Nuclear instruments and methods in physics research, section B: beam interactions with materials and atoms, vol.B96, 1-2, pt.1(pp.1-440) reprinted from |
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