資料の表示
[M] Ion Implantation Technology- 94 : Proceedings of The Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994: IIT 94
著者: editors: Salvatore Coffa, Giuseppe Ferla, Francesco Priolo, Emanuele Rimini 出版者: North-Holland
(出版日: 1995)
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 1012p; 27cm |
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識別子: | ISBN: 9780444821942 |
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注記: |
Part 1(pp.1-440) reprinted from: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. B96, 1-2 |
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