[M] Chemical Vapor Deposition of Tungsten and Tungsten Silicides : For VLSI/ULSI Applications Technology

Creator: by John E.J. Schmitz Publisher: Noyes Publications (Date of publication: 1992-01-01)

• Detail

Edition:
Number:	Volume number: Technology
Form:	Volume
Language:	English
Physical description:	235p; 24cm
Subject:
Classification:	UDC: 661.8...65
Tag:
Identifier:	ISBN: 9780815512882
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218914	Namiki	Books 24	661.8...|S|11502	Available On Shelf

• Reserve this manifestation
  (0 users)