[M] Chemical Vapor Deposition of Tungsten and Tungsten Silicides : For VLSI/ULSI Applications Technology

Creator: by John E.J. Schmitz Publisher: Noyes Publications (Date of publication: 1992)

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Edition:
Number:	Volume number: Technology
Form:	Volume
Language:	English
Physical description:	235p; 24cm
Subject:
Classification:	UDC: 661.8...65
Tag:
Identifier:	ISBN: 9780815512882
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218914	Sengen	Books 13	661.8...|S|11502	Available On Shelf

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