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Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
editors, G.S Oehrlein ... [et al.]
Creator: Oehrlein, G.S Publisher: Materials Research Society (Date of publication: 2001)
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| Language: | English |
| Physical description: | 1 v. ; 24 cm |
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ISBN: 9781558995208
ISSN: 02729172
NCID: BA52824872
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218944 | Namiki |
Journal Archives 60 |
MRS|P|612 | Available On Shelf |