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Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A. 
editors, Suryadevara V. Babu ... [et al.]
Creator: Babu, Suryadevara V. Cadien, Kenneth C. Yano, Hiroyuki Publisher: Materials Research Society (Date of publication: 2001)
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Volume
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| Language: | English |
| Physical description: | 1 v. ; 24 cm |
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ISBN: 9781558996076
NCID: BA56818816
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219170 | Namiki |
Journal Archives 60 
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MRS|P|671 | Available On Shelf |