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Science and Technology of Semiconductor Surface Preparation : Symposium held April 1-3, 1997, San Francisco, California, U.S.A.; MRS Vol.477 Vol.477 
Creator: editors, Gregg S. Higashi, Masataka Hirose, Srini Raghavan [et al.] Publisher: Materials Research Society(MRS)
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| Language: | English |
| Physical description: | 545 p. (1 - 545) |
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| Identifier: | ISBN: 9781558993815 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 217571 | Sengen |
Proceedings 26 
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MRS|Ｐ|10453 | Available On Shelf |