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Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A. 
editors, Gregg S. Higashi ... [et al.]
Creator: Higashi, Gregg S. Publisher: Materials Research Society (Date of publication: 1997)
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Volume
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| Language: | English |
| Physical description: | xiii, 545 p. ; 24 cm |
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ISBN: 9781558993815
NCID: BA33623148
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 217571 | Namiki |
Journal Archives 60 
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MRS|P|477 | Available On Shelf |