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Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis 
edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman
Creator: Cuomo, J. J. Rossnagel, Stephen M. Kaufman, Harold R. Contributor: edited by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman Publisher: Noyes Publications (Date of publication: 1989)
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Volume
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| Language: | English |
| Physical description: | xviii, 438 p. ; 25 cm |
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ISBN: 9780815511991
NCID: BA07446307
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Includes bibliographies and index |
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