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[M] Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. Volume

editors, B.J. Pawlak ... [et al.]
Creator: Publisher: Materials Research Society

Series statement:
  • Materials Research Society symposium proceedings v. 912
Form: Volume Volume
Language: English
Physical description: xi, 213 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781558998681
Abstract:

Note:

"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes

Item identifier Library Shelf Call number Circulation status
210869 Sengen Proceedings 26 Picture MRS|P|12345 Available On Shelf