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Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. 
editors, B.J. Pawlak ... [et al.]
Creator: Materials Research Society. Spring Meeting Pawlak, B. J. Publisher: Materials Research Society (Date of publication: 2006)
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Volume
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| Language: | English |
| Physical description: | xi, 213 p. ; 24 cm |
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ISBN: 9781558998681
NCID: BA7964760X
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"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 210869 | Namiki |
Journal Archives 60 
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MRS|P|912 | Available On Shelf |