資料の表示
[M]
Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. 
editors, B.J. Pawlak ... [et al.]
著者: Materials Research Society. Spring Meeting Pawlak, B. J. 出版者: Materials Research Society (出版日: 2006)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 213 p. ; 24 cm |
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ISBN: 9781558998681
NCID: BA7964760X
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| 注記: |
"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes |
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