[M] Glow Discharge Processes : Sputtering and Plasma Etching

Creator: Brian Chapman Publisher: John Wiley & Sons (Date of publication: 1980)

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Form:	Volume
Language:	English
Physical description:	406p; 24cm
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Identifier:	ISBN: 9780471078289
Abstract:
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Item identifier	Library	Shelf	Call number	Circulation status
216238	Sengen	Books 11	621.3|C|T-679	Available On Shelf

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