[M] Glow discharge processes : sputtering and plasma etching

Brian Chapman
Creator: Chapman, Brian N. Publisher: Wiley (Date of publication: 1980)

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Series statement:	A Wiley-Interscience publication
Form:	Volume
Language:	English
Physical description:	xv, 406 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier:	ISBN: 9780471078289 NCID: BA00536398
Abstract:
Note:	Includes bibliographical references and index

Item identifier	Library	Shelf	Call number	Circulation status
216238	Namiki	Books 21	621.3|C|T-679	Available On Shelf

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