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Silicon Front-End Junction Formation Technology : Symposium held April 2-4, 2002, San Francisco, California, U.S.A. ; MRS Vol.717 Vol.717 Vol.717 
Creator: editors: Daniel F. Downey, Mark E. Law, Alain Cllaverie [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2002)
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| Number: | Volume number: Vol.717 |
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Volume
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| Language: | English |
| Physical description: | 312p; 24cm |
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| Identifier: | ISBN: 9781558996533 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219477 | Sengen |
Proceedings 26 
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MRS|P|11891 | Available On Shelf |