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[M] Silicon Front-End Junction Formation Technology : Symposium held April 2-4, 2002, San Francisco, California, U.S.A. ; MRS Vol.717 Vol.717 Vol.717 冊子体

Creator: editors: Daniel F. Downey, Mark E. Law, Alain Cllaverie [et al.] Publisher: Materials Research Society (MRS) (Date of publication: 2002)

Edition:
Number: Volume number: Vol.717
Form: 冊子体 冊子体
Language: English
Physical description: 312p; 24cm
Subject:
Classification:
Identifier: ISBN: 9781558996533
Abstract:

Note:

Item identifier Library Shelf Call number Circulation status
219477 Sengen Proceedings 26 Picture MRS|P|11891 Available On Shelf