Showing Manifestation
[M]
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A. 
editors, Daniel F. Downey ... [et al.]
Creator: Downey, Daniel F. Publisher: Materials Research Society (Date of publication: 2002)
| Series statement: |
|
| Form: |
Volume
|
| Language: | English |
| Physical description: | xi, 312 p. ; 24 cm |
| Subject: | |
| Classification: | |
| Tag: |
|
| Identifier: |
ISBN: 9781558996533
NCID: BA5886207X
|
| Abstract: | |
| Note: |
Includes bibliographical references and indexes |
|---|
| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219477 | Namiki |
Journal Archives 60 
|
MRS|P|717 | Available On Shelf |