[M] Silicon Front-End Junction Formation Technology : Symposium held April 2-4, 2002, San Francisco, California, U.S.A. ; MRS Vol.717 Vol.717 Vol.717

Creator: editors: Daniel F. Downey, Mark E. Law, Alain Cllaverie [et al.] Publisher: Materials Research Society (MRS) (Date of publication: 2002)

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Edition:
Number:	Volume number: Vol.717
Form:	冊子体
Language:	English
Physical description:	312p; 24cm
Subject:
Classification:	UDC: MRS
Identifier:	ISBN: 9781558996533
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
219477	Sengen	Proceedings 26	MRS|P|11891	Available On Shelf

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