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[M] Ultra Clean Processing of Silicon Surfaces : Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 Vols. 76-77 Vols.76-77
Creator: Editors: Marc Heyns, Paul Mertens, Marc Meuris Publisher: Scitec Publications Ltd
(Date of publication: 2000)
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Number: | Volume number: Vols.76-77 |
Form: | Volume |
Language: | English |
Physical description: | 321p; 25cm |
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Identifier: | ISBN: 9783908450573 ISSN: 10120394 |
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