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[M] Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 Volume

editors, Marc Heyns, Paul Mertens and Marc Meuris
Creator: Publisher: Scitec Publications (Date of publication: 2001)

Series statement:
  • Diffusion and defect data : solid state data pt. B . Solid state phenomena ; v. 76-77
(ISSN: 10120394)
Form: Volume Volume
Language: English
Physical description: xiii, 321 p. ; 25 cm
Subject:
Classification:
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Identifier: ISBN: 9783908450573 ISSN: 10120394
Abstract:

Note:

Includes bibliographical references and indexes
Item identifier Library Shelf Call number Circulation status
218743 Namiki Journal Archives 8 Picture 548.526|D|11420 Available On Shelf