[M] Ultra Clean Processing of Silicon Surfaces : Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000 Vols. 76-77 Vols.76-77

Creator: Editors: Marc Heyns, Paul Mertens, Marc Meuris Publisher: Scitec Publications Ltd (Date of publication: 2000)

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Edition:
Number:	Volume number: Vols.76-77
Form:	Volume
Language:	English
Physical description:	321p; 25cm
Subject:
Classification:	UDC: 548.526
Tag:
Identifier:	ISBN: 9783908450573 ISSN: 10120394
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218743	Sengen	Books 9	548.526|D|11420	Available On Shelf

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