[M] Metal Impurities in Silicon-Device Fabrication 24 24

Creator: Klaus Graff Publisher: Springer (Date of publication: 1995)

• Detail

Edition:
Number:	Volume number: 24
Form:	Volume
Language:	English
Physical description:	216p; 25cm
Subject:
Classification:	UDC: 669.05
Tag:
Identifier:	ISBN: 9783540583172
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
216829	Sengen	Books 14	669.05|Ｇ|9775	Available On Shelf

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