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Metal impurities in silicon-device fabrication : gw 
Klaus Graff
Creator: Graff, Klaus Publisher: Springer-Verlag (Date of publication: 1995)
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| Number: | Volume number: : gw |
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Volume
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| Language: | English |
| Physical description: | ix, 216 p. ; 25 cm |
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ISBN: 9783540583172
NCID: BA24136474
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Includes bibliographical references and index |
