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高集積回路配線用高性能アルミニウム合金の開発
研究代表者:伊藤吾朗
Creator: 伊藤, 吾朗 Publisher: 軽金属奨学会 (Date of publication: 2000)
| Titlte alternative: | Development of high performance aluminum alloys for the interconnection in highly integrated large scale circuits |
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| Language: | Japanese |
| Physical description: | 123p ; 30cm |
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NCID: BA48003522
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英文併記 |
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