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Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. 
editors, Janice L. Veteran. ... [et al.]
Creator: Veteran, Janice L. Materials Research Society Publisher: Materials Research Society (Date of publication: 2002)
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Volume
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| Language: | English |
| Physical description: | xvii, 672 p. ; 24 cm |
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ISBN: 9781558996526
NCID: BA60694309
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219476 | Namiki |
Journal Archives 60 
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MRS|P|716 | Available On Shelf |