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[M] CMOS Front-End Materials and Process Technology : Symposium held April 22-24, 2003, San Francisco, California, U.S.A. ; MRS Vol.765 Vol.765 Vol.765
Creator: editors, Tsu-Jae King, Bin Yu, Robert J.P. Lander [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2003)
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Number: | Volume number: Vol.765 |
Form: | Volume |
Language: | English |
Physical description: | 308p; 24cm |
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Identifier: | ISBN: 9781558997028 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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219520 | Sengen | Proceedings 26 | MRS|P|11934 | Available On Shelf |