資料の表示
[M]
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. 
editors, Tsu-Jae King ... [et al.]
著者: King, Tsu-Jae Yu, Bin Lander, Robert J. P. Saito, Shuichi Materials Research Society 出版者: Materials Research Society (出版日: 2003)
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| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 308 p. ; 24 cm |
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ISBN: 9781558997028
NCID: BA64331431
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| 注記: |
Includes bibliographical references and indexes |
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