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Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988
edited under the responsibility of T. Takagi ... [et al.]
Creator:
International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan) Takagi, T. Publisher:
North-Holland (Date of publication:
1989)
| Titlte alternative: | Ion implantation technology 7 |
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| Language: | English |
| Physical description: | xx, 994 p. ; 27 cm |
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| Identifier: |
NCID: BA36830910
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| Note: |
Includes bibliographical references and index |
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