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[M] Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988 Volume

edited under the responsibility of T. Takagi ... [et al.]
Creator: Publisher: North-Holland (Date of publication: 1989)

Titlte alternative: Ion implantation technology 7
Series statement:
  • Nuclear instruments & methods in physics research Section B. Beam interactions with materials and atoms ; v.37-38
Form: Volume Volume
Language: English
Physical description: xx, 994 p. ; 27 cm
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Includes bibliographical references and index

Item identifier Library Shelf Call number Circulation status
525043 Namiki Books 10 Picture 539.1|| Available On Shelf