資料の表示
[M] Journal of Vacuum Science & Technology Vol.13 No.4-6 / No.4 ; 3rd Annual Conference on the Physics of Compound Semiconductor Interfaces / No.5 ; Proceedings of the Symposium on Advances in Ion Technology Vol.13 No.4-6
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1976)
定期刊行物: | Journal of Vacuum Science & Technology |
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版: | |
巻号: | 巻: Vol.13 号: No.4-6 |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 751p; 29cm |
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識別子: | ISSN: 00225355 |
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