[M] Journal of Vacuum Science & Technology Vol.15 No.3-6 / No.3 ; Proceedings of the 14th Symposium on Electron, Ion, and Photon Beam Technology, 25-27 May 1977 Rickey's Hyatt House Palo Alto, California / No.4 ; Proceedings of the 5th Annual Conference on the Physics of Compound Semiconductor Interfaces, 17-20 January 1978 Davidson Conference Center University of Southern California University Park Los Angeles, California / No.5 ; Proceedings of the AVS Symposium on Ion Implantation -- New Prospects for Materials Modification, 14 June 1978 T.J. Watson Research Center Yorktown Heights, New York Vol.15 No.3-6

Publisher: for The American Vacuum Society by the American Institute of Physics (Date of publication: 1978)

• Detail

Periodical:	Journal of Vacuum Science & Technology
Edition:
Number:	Volume number: Vol.15 Issue number: No.3-6
Form:	Volume
Language:	English
Physical description:	837p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 00225355
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
120483	Sengen	Journal Archives	|J|T-1367	Available On Shelf Not For Loan