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[M] Silicon Front-End Junction Formation-- Physics and Technology : Symposium held April 13-15, 2004, San Francisco, California, U.S.A. ; MRS Vol.810 Vol.810 Vol.810 Volume


Creator: Publisher: Materials Research Society (MRS) (Date of publication: 2004)

Edition:
Number: Volume number: Vol.810
Form: Volume Volume
Language: English
Physical description: 494p; 24cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781558997608
Abstract:

Note:

Item identifier Library Shelf Call number Circulation status
219665 Sengen Proceedings 26 Picture MRS|P|12043 Available On Shelf