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Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. 
editors, Peter Pichler ... [et al.]
Creator: Pichler, Peter Publisher: Materials Research Society (Date of publication: 2004)
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Volume
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| Language: | English |
| Physical description: | xvi, 494 p. ; 24 cm |
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ISBN: 9781558997608
NCID: BA68606972
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219665 | Namiki |
Journal Archives 60 
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MRS|P|810 | Available On Shelf |