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[M] Silicon Front-End Junction Formation-- Physics and Technology : Symposium held April 13-15, 2004, San Francisco, California, U.S.A. ; MRS Vol.810 Vol.810 Vol.810
Creator: editors: Peter Pichler, Alain Cllaverie, Richard Lindsay [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2004)
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Number: | Volume number: Vol.810 |
Form: | Volume |
Language: | English |
Physical description: | 494p; 24cm |
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Identifier: | ISBN: 9781558997608 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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219665 | Sengen | Proceedings 26 | MRS|P|12043 | Available On Shelf |