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Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics - 2004 : Symposium held April 13-15, 2004, San Francisco, California, U.S.A. ; MRS Vol.812 Vol.812 Vol.812 
Creator: editors； R.J. Carter, C.S. Hau-Riege, G.M. Kloster [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2004)
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| Number: | Volume number: Vol.812 |
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Volume
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| Language: | English |
| Physical description: | 402p; 24cm |
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| Identifier: | ISBN: 9781558997622 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219680 | Sengen |
Proceedings 26 
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MRS|P|12057 | Available On Shelf |