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Chemical-Mechanical Planarization - Integration, Technology and Reliability : Symposium held March 28-31, 2005, San Francisco, California, U.S.A. ; MRS Vol.867 Vol.867 Vol.867 
Creator: editors；Ashok Kumar, Jeffrey A. Lee, Yaw S. Obeng [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2005)
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| Number: | Volume number: Vol.867 |
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Volume
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| Language: | English |
| Physical description: | 302p; 24cm |
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| Identifier: | ISBN: 9781558998209 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219785 | Sengen |
Proceedings 26 
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MRS|P|12137 | Available On Shelf |