Showing Manifestation
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Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A. 
editors, Ashok Kumar ... [et al.]
Creator: Materials Research Society Kumar, Ashok Publisher: Materials Research Society (Date of publication: 2005)
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Volume
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| Language: | English |
| Physical description: | xi, 302 p. ; 24 cm |
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ISBN: 9781558998209
NCID: BA73187551
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219785 | Namiki |
Journal Archives 60 
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MRS|P|867 | Available On Shelf |