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Advanced Metallization Conference 2003 (AMC 2003) : Proceedings of the Conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003, University of Tokyo, Tokyo, Japan. This cConference is MRS affiliated and Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. ; MRS Vol.Ⅴ-19 Vol.Ⅴ-19 Vol.Ⅴ-19 
Creator: editors；Gary W. Ray, Tom Smy, Tomohiro Ohta [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2004)
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| Number: | Volume number: Vol.Ⅴ-19 |
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Volume
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| Language: | English |
| Physical description: | 792p; 24cm |
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| Identifier: | ISBN: 9781558997578 ISSN: 10480854 |
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The Advanced Metallization Conference gratefullly asknowledges the support of Novellus Systems, Inc. for the printing of these congerence proceedings.Cu29 |
| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219793 | Sengen |
Proceedings 26 
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MRS|P|12145 | Available On Shelf |