資料の表示
[M] Advanced Metallization Conference 2003 (AMC 2003) : Proceedings of the Conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003, University of Tokyo, Tokyo, Japan. This cConference is MRS affiliated and Sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. ; MRS Vol.Ⅴ-19 Vol.Ⅴ-19 Vol.Ⅴ-19
著者: editors;Gary W. Ray, Tom Smy, Tomohiro Ohta [et al.] 出版者: Materials Research Society (MRS)
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巻号: | 巻: Vol.Ⅴ-19 |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 792p; 24cm |
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識別子: | ISBN: 9781558997578 ISSN: 10480854 |
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The Advanced Metallization Conference gratefullly asknowledges the support of Novellus Systems, Inc. for the printing of these congerence proceedings.Cu29 |
所蔵情報ID | 図書館 | 本棚 | 請求記号 | 貸出状態 |
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219793 | 千現 | プロシーディングス26 | MRS|P|12145 | 在架(利用可能) |