資料の表示
[M]
3rd Symposium on The Deposition of Thin Films by Sputtering, Sept. 9-10, 1969 
著者: co-sponsored by the University of Rochester and the Bendix Corporation Scientific Instruments and Equipment Division 出版者: co-sponsored by the University of Rochester and and the Bendix Corporation Scientific Instruments and Equipment Division
(出版日: 1970)
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 177p; 28cm |
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