Showing Manifestation
[M] Materials, Technology and Reliability for Low-k Dielectrics, and Copper Interconnects - 2006 : Symposium held April 18-21, 2006, San Francisco, California, U.S.A. ; MRS Vol.914 Vol.914
Creator: editors; Ting Y. Tsui, Young-Chang Joo, Lynne Michaelson [et al.] Publisher: Materials Research Society (MRS)
Form: | Volume |
Language: | English |
Physical description: | 462p; 24cm |
Subject: | |
Classification: | |
Tag: |
|
Identifier: | |
Abstract: | |
Note: |
---|
Item identifier | Library | Shelf | Call number | Circulation status |
---|---|---|---|---|
210818 | Sengen | Proceedings 26 | MRS|P|12328 | Available On Shelf |