Plasma electronics : applications in microelectronic device fabrication

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by T. Makabe and Z. Petrović
Creator: 真壁, 利明 Petrović, Z. (Zoran Lj) Publisher: Taylor & Francis (Date of publication: 2006)

Series statement:	Series in plasma physics
Form:	Volume
Language:	English
Physical description:	339 p. ; 24 cm
Subject:
Classification:	UDC: 539.2
Tag:
Identifier:	ISBN: 9780750309769 NCID: BA76918777
Abstract:
Note:	Includes bibliographical references and index

Item identifier	Library	Shelf	Call number	Circulation status
529978	Namiki	Books 11	539.2\|M\|5714	Available On Shelf

Namiki
Books 11
Available On Shelf

539.2

5714