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[M] Plasma Electronics : Applications in Microelectronic Device Fabrication (Series in Plasma Physics) 冊子体

Creator: Publisher: Taylor & Francis (Date of publication: 2006)

Form: 冊子体 冊子体
言語: English
Physical description: 339p; 24cm
Subject:
Classification:
Identifier: ISBN: 9780750309769
Abstract:

Item identifier Library Shelf Call number Circulation status
529978 Namiki Books 8 Picture 539.2|M|5714 Available On Shelf