資料の表示
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The physics and chemistry of SiO[2] and the Si-SiO[2] interface
edited by C. Robert Helms and Bruce E. Deal
著者: Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface Helms, C. Robert Deal, Bruce E. Electrochemical Society. Meeting 協力者・編者: edited by: C. Robert Helms and Bruce E. Deal 出版者: Plenum Press
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言語: | English |
ページ数と大きさ: | xiii, 556 p. ; 26 cm |
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ISBN: 9780306430329
NCID: BA06683045
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"Proceedings of the Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface, held May 15-20, 1988, at the 173rd meeting of the Electrochemical Society, in Atlanta, Georgia"--T.p. verso//Includes bibliographies and index |
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