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[M] Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. Volume

editors, Srikar Vengallatone ... [et al.]
Creator: Publisher: Materials Research Society (Date of publication: 2009)

Series statement:
  • Materials Research Society symposium proceedings v. 1139
Form: Volume Volume
Language: English
Physical description: xi, 247 p. ; 24 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9781605111117
Abstract:

Note:

Other editors: Jörg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing//Includes bibliographical references and indexes

Item identifier Library Shelf Call number Circulation status
211165 Namiki Journal Archives 60 Picture MRS|P|1139 Available On Shelf