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Microelectromechanical Systems - Materials and Devices Ⅱ : Symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. MRS Vol.1139 Vol.1139 Vol.1139 
Creator: editors: Srikar Vengallatore, Jorg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing Publisher: Materials Research Society (MRS)
(Date of publication: 2009)
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| Number: | Volume number: Vol.1139 |
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Volume
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| Language: | English |
| Physical description: | 247p; 24cm |
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| Identifier: | ISBN: 9781605111117 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 211165 | Sengen |
Proceedings 26 
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MRS|P|12549 | Available On Shelf |