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[M] Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Serial Volume


Publisher: American Institute of Physics

Titlte alternative J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
ISSN 0734211X
NCID AA10635106
Holding information

【並木】<年次:1983-1990>Vol.1-8

Note

【配架場所】並木 集密書庫27
継続前誌:Journal of vacuum science and technology
継続後誌:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

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