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Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
Materials Research Society Ayón, Arturo A. Buchheit, Thomas E.
Materials Research Society
(2002)
UDC: MRS
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Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
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