資料の表示
[M]
Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. 
editors, Arturo A. Ayón ... [et al.]
著者: Materials Research Society Ayón, Arturo A. Buchheit, Thomas E. Kahn, Harold Spearing, S. Mark 出版者: Materials Research Society (出版日: 2002)
| 代替タイトル: | Materials science of microelectromechanical systems (MEMS) devices 4//Materials science of microelectromechanical systems (MEMS) devices four |
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| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 318 p. ; 24 cm |
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ISBN: 9781558996236
NCID: BA57659263
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| アブストラクト: | |
| 注記: |
Includes bibliographical references and indexes |
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