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Fundamentals of Microfabrication and Nanotechnology Three-Volume Set
Madou, Marc J.
CRC Press
(2011)
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Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Materials Research Society LaVan, David A. Ayón, Arturo A.
Materials Research Society
(2003)
UDC: MRS
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