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Microelectromechanical systems-materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, U.S.A.
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Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.
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Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Materials Research Society LaVan, David A. Ayón, Arturo A.
Materials Research Society
(2003)
UDC: MRS
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